US 12,253,443 B2
Elemental analysis device for analyzing test sample having cleaning gas supply mechanism
Takahito Inoue, Kyoto (JP); and Hiroshi Uchihara, Kyoto (JP)
Assigned to HORIBA, LTD., Kyoto (JP)
Appl. No. 17/905,856
Filed by HORIBA, LTD., Kyoto (JP)
PCT Filed Feb. 18, 2021, PCT No. PCT/JP2021/006093
§ 371(c)(1), (2) Date Sep. 8, 2022,
PCT Pub. No. WO2021/182059, PCT Pub. Date Sep. 16, 2021.
Claims priority of application No. 2020-042062 (JP), filed on Mar. 11, 2020.
Prior Publication US 2023/0098544 A1, Mar. 30, 2023
Int. Cl. G01N 1/22 (2006.01); G01N 1/14 (2006.01); G01N 1/20 (2006.01); G01N 1/34 (2006.01)
CPC G01N 1/2205 (2013.01) [G01N 1/14 (2013.01); G01N 1/2035 (2013.01); G01N 1/2226 (2013.01); G01N 1/2247 (2013.01); G01N 1/34 (2013.01); G01N 2001/1436 (2013.01); G01N 2001/205 (2013.01); G01N 2001/2235 (2013.01); G01N 2001/2238 (2013.01); G01N 2001/227 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An elemental analysis device comprising:
a heating furnace in which a test sample that is placed in a crucible is heated so that a sample gas is generated from the test sample;
an inflow path through which a carrier gas is introduced into the heating furnace;
an outflow path through which a mixture gas made up of the carrier gas and the sample gas is led out from the heating furnace;
a dust filter that is provided on the outflow path;
an analysis mechanism that is provided on the outflow path on a downstream side from the dust filter, and that detects one or a plurality of predetermined components contained in the mixture gas;
a cleaning gas supply mechanism that supplies cleaning gas to the dust filter in an opposite direction from a direction in which the mixture gas is flowing;
an exhaust flow path that branches off from between the dust filter and the analysis mechanism on the outflow path, and through which the gas that has passed through the dust filter is exhausted, wherein
the cleaning gas supply mechanism comprises:
a flow path switching portion that is equipped with at least a switching valve that is disposed on a branch point between the outflow path and the exhaust flow path, and that switches flow paths in such a way that cleaning gas flows in an opposite direction from a direction in which the mixture gas is flowing along the outflow path; and
a cleaning gas supply portion that supplies cleaning gas to the exhaust flow path or to the switching valve.