| CPC G01L 1/2293 (2013.01) | 9 Claims |
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1. A force sensor comprising a resin substrate, an array substrate, a sensor layer, a common electrode, and a protective film that are sequentially stacked, wherein
the array substrate includes
a stretchable base material stacked on the resin substrate, and
an array layer stacked on the resin substrate with the stretchable base material interposed between the array layer and the resin substrate,
the stretchable base material includes
a plurality of first extension parts extending in a first direction parallel to the resin substrate and arranged in a second direction parallel to the resin substrate and intersecting the first direction,
a plurality of second extension parts extending in the second direction and arranged in the first direction, and
a plurality of body parts provided at parts where the first extension parts intersect the second extension parts,
the array layer includes
a plurality of array-layer branch parts stacked on the first extension parts or the second extension parts, and
a plurality of array-layer body parts stacked on the body parts,
the array-layer body parts each include
a first surface facing the common electrode, and
an array electrode stacked on the first surface,
the sensor layer includes a plurality of divisional sensor layers divided in the first direction and the second direction, and
the divisional sensor layers are provided on the first surfaces and cover the array electrodes.
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