US 12,253,413 B2
Light detection device
Hiroki Oyama, Hamamatsu (JP); Katsumi Shibayama, Hamamatsu (JP); Takashi Kasahara, Hamamatsu (JP); Masaki Hirose, Hamamatsu (JP); Toshimitsu Kawai, Hamamatsu (JP); and Yumi Kuramoto, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/288,593
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Aug. 23, 2019, PCT No. PCT/JP2019/033079
§ 371(c)(1), (2) Date Apr. 26, 2021,
PCT Pub. No. WO2020/090200, PCT Pub. Date May 7, 2020.
Claims priority of application No. 2018-204156 (JP), filed on Oct. 30, 2018.
Prior Publication US 2021/0396579 A1, Dec. 23, 2021
Int. Cl. G01J 3/26 (2006.01); G01J 1/04 (2006.01); G01J 5/28 (2006.01); G02B 5/28 (2006.01)
CPC G01J 3/26 (2013.01) [G01J 1/04 (2013.01); G01J 5/28 (2013.01); G02B 5/28 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A light detection device comprising:
a mounting substrate having a main surface, the main surface being an outermost surface of the mounting substrate;
a light detector that includes one or more light receivers, the light detector having a surface that faces the main surface of the mounting substrate and that is disposed on the main surface of the mounting substrate;
a Fabry-Perot interference filter configured so that a distance between a pair of mirror parts changes due to an electrostatic force by forming a gap between the pair of mirror parts facing each other;
a support provided on the main surface of the mounting substrate and configured to support the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are spaced apart from each other; and
a ground part connected to a ground potential,
wherein a second current path having a smaller electrical resistance than that of an arbitrary first current path extending from the Fabry-Perot interference filter to the light detector via the support and the mounting substrate is formed between the Fabry-Perot interference filter and the ground part.