US 12,253,411 B2
Micro light emitting device inspection apparatus
Cheng-Cian Lin, MiaoLi County (TW)
Assigned to PlayNitride Display Co., Ltd., MiaoLi County (TW)
Filed by PlayNitride Display Co., Ltd., MiaoLi County (TW)
Filed on Dec. 20, 2022, as Appl. No. 18/084,560.
Claims priority of application No. 111146087 (TW), filed on Dec. 1, 2022.
Prior Publication US 2024/0183708 A1, Jun. 6, 2024
Int. Cl. G01J 1/42 (2006.01); G01J 1/04 (2006.01)
CPC G01J 1/4257 (2013.01) [G01J 1/0425 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A micro light emitting device inspection apparatus, adapted to inspect a plurality of micro light emitting devices, and comprising:
a carrier stage, configured to hold the micro light emitting devices, wherein each of the micro light emitting devices emits a light beam;
a light guide module, disposed on an optical path of the light beam emitted by each of the micro light emitting devices, and comprising:
a plurality of optical fibers, each having a light receiving surface and a light emitting surface away from each other, wherein the light receiving surface of each optical fiber is disposed corresponding to at least one micro light emitting device and is configured to receive at least one light beam emitted by the at least one micro light emitting device, and the at least one light beam is transmitted in one of the optical fibers and exits through the light emitting surface; and
a detective module, disposed on one side of the light emitting surfaces of the optical fibers, and comprises a plurality of sensing units, the light emitting surface of each of the optical fibers corresponds to at least one of the sensing units, and the at least one light beam emitted from the light emitting surface of each of the optical fibers is received by the at least one of the sensing units, wherein each of the sensing units comprises a first sensor, a second sensor, and a third sensor, a plurality of first filter patterns, a plurality of second filter patterns and a plurality of third filter patterns are disposed between the sensing units and the light emitting surfaces of the optical fibers, the first filter patterns are respectively overlapped with the plurality of the first sensors, the second filter patterns are respectively overlapped with the plurality of second sensors, the third filter patterns are respectively overlapped with the plurality of the third sensors, and the detective module is configured to receive and detect the at least one light beam from the light emitting surface of each optical fiber, so as to obtain at least one optical property.