US 12,253,356 B2
Circuits and methods to calibrate mirror displacement
Robert Floyd Payne, McKinney, TX (US); and James Norman Hall, Parker, TX (US)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed on Apr. 26, 2021, as Appl. No. 17/240,483.
Prior Publication US 2022/0342202 A1, Oct. 27, 2022
Int. Cl. G01B 7/14 (2006.01); G01B 7/06 (2006.01); G01R 17/00 (2006.01); G01R 27/26 (2006.01); G01R 35/00 (2006.01); G02B 26/08 (2006.01)
CPC G01B 7/08 (2013.01) [G01R 27/2605 (2013.01); B81B 2201/042 (2013.01); G01B 7/14 (2013.01); G01R 17/00 (2013.01); G01R 35/005 (2013.01); G02B 26/0841 (2013.01); G09G 2320/0693 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A circuit comprising:
a voltage generator having an input and an output, the output being selectively connectable to a first capacitor plate of a capacitive structure to supply a voltage to the capacitive structure;
a digital controller having and an input and first and second outputs, the first output being coupled to the input of the voltage generator and the second output being coupled to a second capacitor plate of the capacitive structure;
a reference voltage generator having an input and an output, the input being coupled to the output of the voltage generator, the reference voltage generator generating a reference voltage;
a comparator having a first input, a second input, and an output, the first input being coupled to the output of the reference voltage generator to receive the reference voltage, the second input being selectively connectable to the capacitive structure to receive a discharging voltage, and the output being coupled to the input of the digital controller; and
a current source that is selectively connectable to the capacitive structure.