US 12,253,350 B2
THz measurement method and THz measurement device for measuring a measurement object
Marius Thiel, Osnabrück (DE); and Ralph Klose, Melle (DE)
Assigned to CITEX HOLDING GMBH, Melle (DE)
Appl. No. 18/018,988
Filed by CITEX HOLDING GMBH, Melle (DE)
PCT Filed Aug. 4, 2021, PCT No. PCT/DE2021/100669
§ 371(c)(1), (2) Date Jan. 31, 2023,
PCT Pub. No. WO2022/028655, PCT Pub. Date Feb. 10, 2022.
Claims priority of application No. 102020120547.3 (DE), filed on Aug. 4, 2020.
Prior Publication US 2023/0288189 A1, Sep. 14, 2023
Int. Cl. G01B 11/06 (2006.01)
CPC G01B 11/06 (2013.01) 14 Claims
OG exemplary drawing
 
1. A THz measuring method for measuring a measured object, the THz measuring method comprising the steps of
calibration measurement with emitting a THz transmission beam through an empty measuring space towards a main reflector along an optical axis, reflection of the THz transmission beam at the main reflector along the optical axis back to the THz transceiver and detecting a calibration main reflection peak at a calibration point in time,
introducing a measured object into the measuring space,
object measurement with emitting the THz transmission beam from the THz transceiver along the optical axis through the measuring space and the measured object towards the main reflector, reflection of the THz transmission beam along the optical axis back to the THz transceiver and detecting a measuring main reflection peak of the object measurement at a main reflection point in time,
determining a total time delay of the main reflection time in relation to the calibration time, and
allocating the total time delay to a sum of the temporal delays of the THz transmission beam in the wall regions and determining geometric layer thicknesses of the measured object.