US 12,253,190 B2
Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment
Mariusch Gregor, Gilroy, CA (US); Theodoros Panagopoulos, Los Gatos, CA (US); and Thorsten Bernd Lill, Kalaheo, HI (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Oct. 18, 2023, as Appl. No. 18/489,829.
Application 18/489,829 is a continuation of application No. 17/629,740, granted, now 11,796,085, previously published as PCT/US2020/043318, filed on Jul. 23, 2020.
Claims priority of provisional application 62/879,274, filed on Jul. 26, 2019.
Prior Publication US 2024/0044422 A1, Feb. 8, 2024
Int. Cl. F16K 99/00 (2006.01); H01L 21/67 (2006.01)
CPC F16K 99/0015 (2013.01) [F16K 99/0028 (2013.01); F16K 99/0059 (2013.01); H01L 21/67017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a substrate having one or more microfluidic valve structures, each microfluidic valve structure of the one or more microfluidic valve structures including:
a diaphragm having a first side, and a second side opposite the first side;
a base;
an orifice in the base; and
a raised seat structure, wherein, for each microfluidic valve structure:
the diaphragm is made from a non-elastomeric material,
the raised seat structure extends from the base towards the first side of the diaphragm,
a surface of the raised seat structure facing the diaphragm is separated from the first side of the diaphragm by a gap when the microfluidic valve structure is in an undeformed state, and
the diaphragm, the raised seat structure, and the gap of that microfluidic valve structure are sized such that, when that microfluidic valve structure is transitioned to an actuated state by pressurizing the second side of the diaphragm to a first pressure,
a portion of the diaphragm is caused to elastically deform towards, and seal against, the raised seat structure.