| CPC F16K 27/0236 (2013.01) [F16K 7/17 (2013.01)] | 4 Claims | 

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               1. A valve, comprising: 
            a single-use centerbody assembly including: 
                a centerbody having a process surface, an opposed back surface, a peripheral surface that extends between the process surface and the back surface, at least one inlet orifice disposed in the centerbody communicating with the process surface, and a plurality of outlet orifices disposed in the centerbody communicating with the process surface separate from the at least one inlet orifice; 
                  an inlet fitting extending outward from the peripheral surface, the inlet fitting defining an inlet port disposed in fluid communication with the at least one inlet orifice; 
                  an outlet fitting extending outward from the peripheral surface, the outlet fitting defining an outlet port disposed in fluid communication with the at least one plurality of outlet orifices; and 
                  an outlet manifold formed integrally within the centerbody and forming a fluid connection between the plurality of outlet orifices and the outlet fitting, wherein a portion of the outlet manifold is open to the back surface; 
                  a control diaphragm positioned facing the process surface, wherein a perimeter of the control diaphragm is bonded to the centerbody so as to define a seal that blocks the passage of fluid; and 
                  a backside diaphragm positioned adjacent the back surface, wherein a perimeter of the backside diaphragm is bonded to the centerbody so as to define a seal that blocks the passage of fluid, wherein the portion of the outlet manifold that is open to the back surface is closed off by the backside diaphragm; 
                an enclosure assembly including: (1) a top cap adapted to be disposed in fluid communication with a fluid at a predetermined reference pressure, wherein the control diaphragm is positioned between the centerbody and the top cap, and arranged such that, when the reference pressure is higher than the process pressure the control diaphragm is drawn into a sealing relationship with the plurality of outlet orifices, and when the process pressure is higher than the reference pressure, an area of the control diaphragm between the plurality of outlet orifices is persuaded away from the plurality of outlet orifices thereby allowing venting through the outlet port, and (2) a bottom support, wherein the backside diaphragm is positioned between the centerbody and the bottom support, and the centerbody assembly is clamped between the top cap and the bottom support; 
                wherein the centerbody comprises a polymer; 
                wherein the control diaphragm comprises a polymer; 
                wherein the backside diaphragm comprises a polymer; and 
                wherein the enclosure assembly comprises a metal alloy. 
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