US 12,252,805 B2
Single crystal pulling apparatus hot-zone structure, single crystal pulling apparatus and crystal ingot
Qinhu Mao, Xi'an (CN); Bokcheol Sim, Xi'an (CN); and Jinkun Kim, Xi'an (CN)
Assigned to XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD., Xi'an (CN); and XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD., Xi'an (CN)
Appl. No. 17/603,928
Filed by Xi'an ESWIN Material Technology Co., Ltd., Xi'an (CN); and Xi'an ESWIN Silicon Wafer Technology Co., Ltd., Xi'an (CN)
PCT Filed May 11, 2021, PCT No. PCT/CN2021/093007
§ 371(c)(1), (2) Date Oct. 14, 2021,
PCT Pub. No. WO2021/244234, PCT Pub. Date Dec. 9, 2021.
Claims priority of application No. 202010505348.1 (CN), filed on Jun. 5, 2020.
Prior Publication US 2022/0307156 A1, Sep. 29, 2022
Int. Cl. C30B 15/14 (2006.01); C30B 29/06 (2006.01)
CPC C30B 15/14 (2013.01) [C30B 29/06 (2013.01); Y10T 117/1068 (2015.01)] 16 Claims
OG exemplary drawing
 
1. A single crystal pulling apparatus Hot-Zone structure applied to a single crystal pulling apparatus comprising a puller body and a crucible provided in a center of the puller body, and comprising:
a side heater provided in a periphery of the crucible; and
a diversion assembly enclosed between the side heater and a side wall of the crucible and below the crucible, the diversion assembly configured to form a gas flow passage with an outer wall of the crucible, the gas flow passage being connected to outside of the puller body to discharge a gas to the outside of the puller body;
wherein:
the diversion assembly comprises a side heat conduction cylinder, a bottom heat conduction plate and an exhaust cylinder, the side heat conduction cylinder provided between the side heater and the crucible and surrounding the side wall of the crucible, the bottom heat conduction plate provided below the crucible, and a bottom end of the side heat conduction cylinder connected to the bottom heat conduction plate in a sealed manner,
at least one exhaust hole is provided in the bottom heat conduction plate, and
the exhaust cylinder is provided through the exhaust hole, one end of the exhaust cylinder connected to the gas flow passage, and the other end of the exhaust cylinder extending to the outside of the puller body;
wherein the single crystal pulling apparatus Hot-Zone structure further comprises a bottom heater provided below the bottom heat conduction plate;
wherein the at least one exhaust hole is arranged in the bottom heater;
wherein the single crystal pulling apparatus Hot-Zone structure further comprises a side heat insulation material layer provided between the side heater and an inner side wall of the puller body, and a bottom heat insulation material layer provided between the bottom heater and a bottom wall of the puller body; and
wherein the side heat insulation material layer comprises a first part above the side heater and a second part, and an orthographic projection of the first part onto the bottom heat insulation material layer covers an orthographic projection of the side heater onto the bottom heat insulation material layer, and does not overlap an orthographic projection of the crucible onto the bottom heat insulation material layer;
wherein in each exhaust hole, the exhaust cylinder sequentially passes through the bottom heat conduction plate, the bottom heater, the bottom heat insulation material layer and the puller body.