US 12,252,804 B2
Quartz glass crucible
Hiroshi Kishi, Akita (JP); Kouta Hasebe, Akita (JP); Takahiro Abe, Tokyo (JP); and Hideki Fujiwara, Tokyo (JP)
Assigned to SUMCO CORPORATION, Tokyo (JP)
Filed by SUMCO CORPORATION, Tokyo (JP)
Filed on Aug. 30, 2022, as Appl. No. 17/899,479.
Application 17/899,479 is a division of application No. 16/969,134, granted, now 11,466,381, previously published as PCT/JP2019/004974, filed on Feb. 13, 2019.
Claims priority of application No. 2018-030404 (JP), filed on Feb. 23, 2018; and application No. 2018-187506 (JP), filed on Oct. 2, 2018.
Prior Publication US 2022/0411956 A1, Dec. 29, 2022
Int. Cl. C30B 15/10 (2006.01)
CPC C30B 15/10 (2013.01) 24 Claims
OG exemplary drawing
 
1. A quartz glass crucible comprising:
a quartz glass crucible body having a cylindrical side wall portion, a curved bottom portion, and a corner portion which has a larger curvature than that of the bottom portion and connects the side wall portion and the bottom portion to each other; and
an inner-surface coating film which contains a crystallization accelerator and is formed on an inner surface of the quartz glass crucible body,
wherein the inner surface of the quartz glass crucible body is under compressive stress,
an average grain size of crystal grains contained in an inner crystal layer formed in a vicinity of the inner surface of the quartz glass crucible body due to an action of the inner-surface coating film heated during a step of pulling a silicon single crystal is 0.1 to 100 μm,
a peak of a frequency distribution of the crystal grains is in a range of 0.1 to 100 μm, and
plane orientations of the inner crystal layer having first and second highest area occupancy ratios, among all plane orientations of the inner crystal layer, account for 50% or more of total area occupancy ratios of the all plane orientations as viewed from an inner surface side of the quartz glass crucible body.