| CPC C23C 14/541 (2013.01) [C23C 14/50 (2013.01); H01L 21/67366 (2013.01); H01L 21/67383 (2013.01); H01L 21/67393 (2013.01)] | 12 Claims |
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1. A carrying device comprising:
a heating plate;
a cooling plate spaced apart from the heating plate;
a thermal insulation structure located between the heating plate and the cooling plate, and configured to support the heating plate to cause the heating plate to be positioned above the cooling plate, the thermal insulation structure including a first O-ring and a second O-ring, the first O-ring and the second O-ring having different inner diameters and being mutually concentric, the first O-ring dividing an unoccupied space between the heating plate and the cooling plate into a first thermal insulation space that is outside the first O-ring and a heat transfer space that is inside the first O-ring, and the second O-ring dividing the first thermal insulation space into a second thermal insulation space that is between the first O-ring and the second O-ring, and a third thermal insulation space that is outside the second O-ring;
an atmospheric passage penetrating a center of the cooling plate from a bottom surface of the cooling plate to a top surface of the cooling plate, and connected to the heat transfer space;
a cooling pipe disposed in the cooling plate, passing through the atmospheric passage, and configured to transport a cooling liquid; and
a heat sink disposed in the cooling plate, the atmospheric passage penetrating a center of the heat sink, a material of the heat sink being graphite, and the cooling pipe being disposed under the heat sink and in contact with the heat sink;
wherein:
the heat transfer space is connected to an atmospheric environment through the atmospheric passage; and
the first thermal insulation space is connected to a non-atmospheric environment.
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