US 12,251,946 B2
Printing system assemblies and methods
Robert B. Lowrance, San Jose, CA (US); Alexander Sou-Kang Ko, Santa Clara, CA (US); Justin Mauck, Belmont, CA (US); Eliyahu Vronsky, Los Altos, CA (US); Aleksey Khrustalev, Sunnyvale, CA (US); Karl Mathia, Menlo Park, CA (US); and Shandon Alderson, San Carlos, CA (US)
Assigned to Kateeva, Inc., Newark, CA (US)
Filed by Kateeva, Inc., Newark, CA (US)
Filed on Feb. 15, 2023, as Appl. No. 18/169,649.
Application 18/169,649 is a continuation of application No. 17/247,013, filed on Nov. 24, 2020, granted, now 11,626,311.
Application 17/247,013 is a continuation of application No. 16/416,523, filed on May 20, 2019, granted, now 10,875,329, issued on Dec. 29, 2020.
Application 16/416,523 is a continuation of application No. 15/836,617, filed on Dec. 8, 2017, granted, now 10,414,181, issued on Sep. 17, 2019.
Application 15/836,617 is a continuation of application No. 15/354,927, filed on Nov. 17, 2016, granted, now 9,884,501, issued on Feb. 6, 2018.
Application 15/354,927 is a continuation of application No. 14/738,785, filed on Jun. 12, 2015, granted, now 9,505,245, issued on Nov. 26, 2016.
Claims priority of provisional application 62/044,165, filed on Aug. 29, 2014.
Claims priority of provisional application 62/037,494, filed on Aug. 14, 2014.
Claims priority of provisional application 62/021,390, filed on Jul. 7, 2014.
Claims priority of provisional application 62/021,563, filed on Jul. 7, 2014.
Claims priority of provisional application 62/013,440, filed on Jun. 17, 2014.
Claims priority of provisional application 62/013,433, filed on Jun. 17, 2014.
Prior Publication US 2023/0290667 A1, Sep. 14, 2023
Int. Cl. B41J 3/28 (2006.01); B41J 3/407 (2006.01); B41J 11/00 (2006.01); B41J 11/06 (2006.01); B41J 11/22 (2006.01); B41J 25/00 (2006.01); B41J 25/304 (2006.01); B41J 29/02 (2006.01); B41J 29/12 (2006.01); B41J 29/38 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); H10K 71/00 (2023.01)
CPC B41J 3/28 (2013.01) [B41J 3/407 (2013.01); B41J 11/0035 (2013.01); B41J 11/0045 (2013.01); B41J 11/0085 (2013.01); B41J 11/06 (2013.01); B41J 11/22 (2013.01); B41J 25/005 (2013.01); B41J 25/304 (2013.01); B41J 29/02 (2013.01); B41J 29/12 (2013.01); B41J 29/38 (2013.01); H01L 21/67784 (2013.01); H01L 21/68 (2013.01); H01L 21/6838 (2013.01); H10K 71/00 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A method, comprising:
supporting a substrate on a gas cushion table;
positioning the substrate in a first linear direction using a y-axis motion system;
moving a dispenser across the substrate in a second linear direction that crosses the first linear direction using an x-axis carriage assembly;
adjusting a z-axis position of the dispenser in a third linear direction substantially perpendicular to the first and second linear directions using a z-axis moving plate coupled to a pneumatic counterbalance;
supporting a component of the y-axis motion system on a first gas cushion and supporting the dispenser on a second gas cushion; and
maintaining orientation of the substrate parallel to the first linear direction by rotating the component of the y-axis motion system about an axis that extends along the third linear direction.