US 12,251,933 B2
Inkjet head, and method for producing inkjet head
Yohei Sato, Hachioji (JP); Akihisa Shimomura, Atsugi (JP); Yoshinori Yoshida, Hino (JP); and Hiroaki Kozai, Kodaira (JP)
Assigned to KONICA MINOLTA, INC., Tokyo (JP)
Appl. No. 18/044,204
Filed by Konica Minolta, Inc., Tokyo (JP)
PCT Filed Sep. 10, 2020, PCT No. PCT/JP2020/034317
§ 371(c)(1), (2) Date Mar. 6, 2023,
PCT Pub. No. WO2022/054204, PCT Pub. Date Mar. 17, 2022.
Prior Publication US 2023/0321978 A1, Oct. 12, 2023
Int. Cl. B41J 2/14 (2006.01); B41J 2/16 (2006.01)
CPC B41J 2/14024 (2013.01) [B41J 2/1606 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An inkjet head comprising a first and a second channel substrates,
wherein at least one of the first and the second channel substrates is formed of silicon;
a bonding interface of the first and the second channel substrates is bonded via an adhesive layer;
a protective film containing a compound having a Si—C bond is formed on: an ink channel surface formed of silicon among the first and the second channel substrates; and a surface of the channel substrate side formed of silicon in the adhesive layer; and
the protective film has a maximum peak in an energy band (99.9 to 100.9 eV) derived from a Si—C bond detected by X-ray photoelectron spectroscopy.