US 12,251,790 B2
Polishing head management system and method
Fan-Wei Liao, Hefei (CN); and Chin-Chung Ku, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Appl. No. 17/435,330
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
PCT Filed Apr. 1, 2021, PCT No. PCT/CN2021/085095
§ 371(c)(1), (2) Date Aug. 31, 2021,
PCT Pub. No. WO2021/213174, PCT Pub. Date Oct. 28, 2021.
Claims priority of application No. 202010313793.8 (CN), filed on Apr. 20, 2020.
Prior Publication US 2022/0324077 A1, Oct. 13, 2022
Int. Cl. B24B 7/22 (2006.01); B23Q 3/155 (2006.01); G05B 19/418 (2006.01)
CPC B24B 7/22 (2013.01) [B23Q 3/15513 (2013.01); G05B 19/4183 (2013.01); G05B 2219/45096 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A polishing head management system, comprising
a storage device, a pick-and-place device and a data acquisition device, wherein
the storage device is used to store polishing heads;
the pick-and-place device is used to pick a polishing head or place a polishing head into the storage device;
the data acquisition device is connected with the storage device and the pick-and-place device, and the data acquisition device is used to record at least one management cycle of the polishing head; the management cycle comprises a time interval between the time of the polishing head being picked from the storage device by the pick-and-place device and the time of the polishing head being placed back into the storage device or a time interval between the time of the polishing head being placed into the storage device by the pick-and-place device and the time of the polishing head being picked from the storage device; and,
wherein the storage device comprises a plurality of storage units; each of the storage units stores each of the polishing heads; the data acquisition device further comprises an identification module; the identification module is used to identify pairing information between each of the storage units and each of the polishing heads;
wherein the identification module comprises a first identification module and a second identification module connected with each other communicatively; the first identification module is used to identify pairing information between the storage unit and the pick-and-place device; the second identification module is used to identify pairing information between the pick-and-place device and the polishing head.