US 12,251,767 B2
Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes
Peter Wiesner, Reut (DE); Wolfgang Gmach, Emmerting (DE); and Robert Kreuzeder, Wurmannsquick (DE)
Assigned to SILTRONIC AG, Munich (DE)
Appl. No. 18/009,348
Filed by Siltronic AG, Munich (DE)
PCT Filed May 20, 2021, PCT No. PCT/EP2021/063443
§ 371(c)(1), (2) Date Dec. 9, 2022,
PCT Pub. No. WO2021/249735, PCT Pub. Date Dec. 16, 2021.
Claims priority of application No. 20179150 (EP), filed on Jun. 10, 2020.
Prior Publication US 2023/0234149 A1, Jul. 27, 2023
Int. Cl. B23D 57/00 (2006.01); B23D 59/00 (2006.01); B28D 5/00 (2006.01); B28D 5/04 (2006.01)
CPC B23D 57/0023 (2013.01) [B23D 57/0061 (2013.01); B23D 59/002 (2013.01); B28D 5/0064 (2013.01); B28D 5/0076 (2013.01); B28D 5/045 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method for cutting a multiplicity of slices from a workpiece using a wire saw during a sequence of cut-off operations, which are divided into initial cuts and follow-on cuts, the wire saw comprising: a wire array of moving wire sections of a saw wire; and actuator, the wire array being tensioned in a plane between two wire guide rollers, each of the two wire guide rollers: being supported between a fixed bearing and a floating bearing, and comprising at least one chamber and a shell which encloses a core of the respective one of the wire guide rollers and which is structured with guide grooves for the wire sections, the method comprising:
before each of the cut-off operations, determining a shape deviation by comparing an average shape profile of already cut-off slices with a reference shape profile; and
during each of the cut-off operations, feeding the workpiece with the actuator, through the wire array along a feed direction perpendicular to a workpiece axis and perpendicular to the plane of the wire array in a presence of a working fluid and hard materials, which act abrasively on the workpiece, the feeding of the workpiece through the wire array further comprising:
during each of the cut-off operations, while feeding the workpiece through the wire array, simultaneously changing a length of the shell of each of the two wire guide rollers by adjusting a temperature of the chamber of each of the wire guide rollers with a first cooling fluid in accordance with a specification of a first temperature profile, which specifies a temperature of the first cooling fluid in dependence on a depth of cut and which correlates with a first correction profile, which specifies a change in a length of the shell of each of the two wire guide rollers in dependence on the depth of cut; and
during each of the cut-off operations, while feeding the workpiece through the wire array, simultaneously moving the workpiece along the workpiece axis in accordance with a specification of a second correction profile, which specifies a travel of the workpiece in dependence on the depth of cut,
wherein the first correction profile and the second correction profile are determined based on the shape deviation for counteracting the shape deviation.