US 12,251,738 B2
Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool
Megumi Uno, Tokyo (JP); Akira Fukunaga, Tokyo (JP); Chikako Takatoh, Tokyo (JP); and Yumiko Nakamura, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Appl. No. 18/041,579
Filed by EBARA CORPORATION, Tokyo (JP)
PCT Filed Jul. 28, 2021, PCT No. PCT/JP2021/027819
§ 371(c)(1), (2) Date Feb. 14, 2023,
PCT Pub. No. WO2022/038978, PCT Pub. Date Feb. 24, 2022.
Claims priority of application No. 2020-138511 (JP), filed on Aug. 19, 2020.
Prior Publication US 2024/0024928 A1, Jan. 25, 2024
Int. Cl. B08B 13/00 (2006.01); B08B 1/14 (2024.01); B08B 1/32 (2024.01); B08B 3/08 (2006.01)
CPC B08B 3/08 (2013.01) [B08B 1/145 (2024.01); B08B 1/32 (2024.01); B08B 13/00 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A cleaning apparatus performing cleaning treatment for a PVA sponge used for substrate washing by causing the PVA sponge to contact with a cleaning member while supplying a washing liquid to the PVA sponge, the cleaning apparatus comprising:
a pump that extracts the washing liquid remaining in the PVA sponge or the washing liquid flowing out from the PVA sponge in the cleaning treatment;
a reserving tank that generates a first reagent by applying an iodine color reaction to the washing liquid extracted by the pump and generates a second reagent by adding a starch degrading enzyme to the first reagent; and
a processor that detects a coloration degree of the first reagent and the second reagent and determines whether or not cleaning of the PVA sponge is completed based on the detected coloration degree.