US 12,251,729 B2
Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane element and methods of manufacturing thereof
Domenico Giusti, Caponago (IT); Fabio Quaglia, Pizzale (IT); and Marco Ferrera, Concorezzo (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on Oct. 8, 2021, as Appl. No. 17/497,542.
Claims priority of application No. 102020000024469 (IT), filed on Oct. 16, 2020.
Prior Publication US 2022/0118480 A1, Apr. 21, 2022
Int. Cl. B06B 1/06 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H10N 30/20 (2023.01); H10N 30/30 (2023.01)
CPC B06B 1/0622 (2013.01) [B81B 3/0021 (2013.01); B81B 7/0016 (2013.01); B81C 1/00158 (2013.01); H10N 30/2047 (2023.02); H10N 30/308 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device, comprising:
a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position; and
at least two piezoelectric elements, each of the at least two piezoelectric elements located over the membrane element along the first direction and configured to:
cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and
generate electric signals in response to oscillations of the membrane element, wherein:
the membrane element has a lobed shape along a plane perpendicular to the first direction, the lobed shape including at least two lobes; and
the membrane element includes for each of the at least two piezoelectric elements a corresponding membrane portion including a corresponding lobe, wherein each of the at least two piezoelectric elements is located over its corresponding membrane portion.