CPC A61M 11/042 (2014.02) [A24F 40/30 (2020.01); A24F 40/46 (2020.01); A24F 40/485 (2020.01); A61M 15/06 (2013.01); H05B 3/42 (2013.01); A24F 40/10 (2020.01)] | 18 Claims |
1. A nebulizer, comprising:
a substrate including a surface;
a heater at the surface of the substrate;
an insulating layer on the surface of the substrate and overlapping the heater at the surface of the substrate;
a chamber layer on the insulating layer, the chamber layer including:
a chamber that is aligned with and overlaps the heater, the chamber including:
a central region aligned with the heater;
a plurality of peripheral regions that are around the central region,
wherein the plurality of peripheral regions are a plurality of niches that extend from the central region;
a nozzle plate on the chamber layer, the nozzle plate including:
a plurality of nozzles that extend through the nozzle plate to the chamber layer, each one of the plurality of nozzles overlaps a corresponding peripheral region of the plurality of peripheral regions.
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