| CPC A61M 11/042 (2014.02) [A24F 40/30 (2020.01); A24F 40/46 (2020.01); A24F 40/485 (2020.01); A61M 15/06 (2013.01); H05B 3/42 (2013.01); A24F 40/10 (2020.01)] | 18 Claims | 

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               1. A nebulizer, comprising: 
            a substrate including a surface; 
                a heater at the surface of the substrate; 
                an insulating layer on the surface of the substrate and overlapping the heater at the surface of the substrate; 
                a chamber layer on the insulating layer, the chamber layer including: 
                a chamber that is aligned with and overlaps the heater, the chamber including: 
                a central region aligned with the heater; 
                a plurality of peripheral regions that are around the central region, 
                wherein the plurality of peripheral regions are a plurality of niches that extend from the central region; 
                a nozzle plate on the chamber layer, the nozzle plate including: 
                a plurality of nozzles that extend through the nozzle plate to the chamber layer, each one of the plurality of nozzles overlaps a corresponding peripheral region of the plurality of peripheral regions. 
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