| CPC A61B 18/14 (2013.01) [A61B 2018/00095 (2013.01); A61B 2018/0047 (2013.01); A61B 18/1206 (2013.01); A61B 2018/142 (2013.01)] | 24 Claims |

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1. An energy delivery device comprising:
an applicator including an electrode and a substrate comprising a ceramic material, the substrate having a first surface, a second surface opposite to the first surface, and one or more outer edges between the first surface and the second surface, and the substrate having a thickness between the first surface and the second surface that varies as a function of position relative to the one or more outer edges,
wherein the ceramic material is aluminum nitride having a dielectric constant of about 9 in a frequency range from 1 Megahertz to 20 Megahertz, the substrate has a centerline, the ceramic material of the substrate extends from the centerline to the one or more outer edges, and the thickness of the ceramic material of the substrate increases non-linearly with increasing distance from the centerline.
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