US 11,929,732 B2
Electro-acoustic resonator and method for manufacturing the same
Florian Lochner, Taufkirchen (DE)
Assigned to RF360 Singapore Pte. Ltd., Republic Plaza (SG)
Appl. No. 17/297,922
Filed by RF360 SINGAPORE PTE. LTD., Singapore (SG)
PCT Filed Dec. 16, 2019, PCT No. PCT/EP2019/085367
§ 371(c)(1), (2) Date May 27, 2021,
PCT Pub. No. WO2020/127064, PCT Pub. Date Jun. 25, 2020.
Claims priority of application No. 10 2018 132 920.2 (DE), filed on Dec. 19, 2018.
Prior Publication US 2021/0328573 A1, Oct. 21, 2021
Int. Cl. H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/175 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/131 (2013.01); H03H 9/568 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An electro-acoustic resonator, comprising:
a carrier substrate;
an acoustic mirror disposed on the carrier substrate;
a bottom electrode disposed on the acoustic mirror;
a piezoelectric layer, disposed on the bottom electrode;
a top electrode disposed on the piezoelectric layer; and
a structured silicon dioxide layer disposed on portions of the piezoelectric layer surrounding a region in which the top electrode is disposed, the portions of the piezoelectric layer and the structured silicon dioxide layer having a common contact surface.