CPC H03H 9/175 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/131 (2013.01); H03H 9/568 (2013.01)] | 14 Claims |
1. An electro-acoustic resonator, comprising:
a carrier substrate;
an acoustic mirror disposed on the carrier substrate;
a bottom electrode disposed on the acoustic mirror;
a piezoelectric layer, disposed on the bottom electrode;
a top electrode disposed on the piezoelectric layer; and
a structured silicon dioxide layer disposed on portions of the piezoelectric layer surrounding a region in which the top electrode is disposed, the portions of the piezoelectric layer and the structured silicon dioxide layer having a common contact surface.
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