US 11,929,504 B2
Coated vertically aligned carbon nanotubes on nickel foam
Wenzhi Li, Miami, FL (US); and Arun Thapa, Miami, FL (US)
Assigned to THE FLORIDA INTERNATIONAL UNIVERSITY BOARD OF TRUSTEES, Miami, FL (US)
Filed by Wenzhi Li, Miami, FL (US); and Arun Thapa, Miami, FL (US)
Filed on Oct. 7, 2022, as Appl. No. 17/938,832.
Application 17/938,832 is a continuation of application No. 17/471,313, filed on Sep. 10, 2021, granted, now 11,476,464.
Prior Publication US 2023/0085275 A1, Mar. 16, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01M 4/583 (2010.01); H01M 4/04 (2006.01); H01M 4/36 (2006.01); H01M 4/38 (2006.01); H01M 4/48 (2010.01); H01M 10/0525 (2010.01); H01M 4/02 (2006.01)
CPC H01M 4/583 (2013.01) [H01M 4/0428 (2013.01); H01M 4/366 (2013.01); H01M 4/38 (2013.01); H01M 4/48 (2013.01); H01M 10/0525 (2013.01); H01M 2004/021 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of synthesizing vertically aligned carbon nanotubes (VACNTs), the method comprising:
providing a pristine nickel foam (Ni—F) substrate in a reaction chamber;
lowering a pressure of the reaction chamber to below 1 Torr and providing a carbon precursor gas to the chamber while direct current (DC) plasma is applied to perform a plasma-enhanced chemical vapor deposition (PECVD) process to synthesize the VACNTs directly on the pristine Ni—F substrate; and
performing a physical vapor deposition process or a chemical vapor deposition process on the VACNTs connected directly to the Ni—F substrate to coat the VACNTs with nanoparticles such that the VACNTs have a coating of the nanoparticles on respective outer walls thereof.