CPC H01L 27/0207 (2013.01) [H01L 21/76885 (2013.01); H01L 21/823871 (2013.01); H01L 23/5226 (2013.01)] | 20 Claims |
1. A device, comprising:
an electrical circuit having a first set of circuit elements;
a first set of conductive pillars over a first side of a substrate;
a first conductive rail electrically connected to each of the first set of conductive pillars, wherein each of the first set of conductive pillars is electrically connected to each of the first set of circuit elements by the first conductive rail; and
a first plurality of power pillars extending through the substrate, wherein each of the first plurality of power pillars is electrically connected to the first conductive rail.
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