CPC H01L 21/67703 (2013.01) [H01L 29/08 (2013.01); C08L 27/16 (2013.01)] | 2 Claims |
1. A workpiece carrier for carrying a workpiece, comprising:
a platform having a first surface and a second surface opposite to each other, the first surface defining a recess configured to carry the workpiece, the second surface defining a plurality of grounding ports; and
an electrode formed on the platform, including a plurality of first electrode portions exposed in a peripheral area of the first surface of the platform around the recess, and at least one second electrode portion disposed on a bottom of at least one of the grounding ports, wherein the plurality of first electrode portions and the at least one second electrode portion are electrically connected to each other.
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