US 11,929,274 B2
Method and apparatus for poling polymer thin films
Hongwei Lu, Jiaxing (CN); Daliang Wang, Jiaxing (CN); Albert Ting, San Jose, CA (US); Efrain Velazquez, Tracy, CA (US); Xiaoyan Zhang, Jiaxing (CN); and Kai-An Wang, Cupertino, CA (US)
Assigned to Creesense Microsystems Inc., Suzhou (CN)
Filed by Creesense Microsystems Inc., Suzhou (CN)
Filed on Jul. 9, 2023, as Appl. No. 18/349,151.
Application 18/349,151 is a division of application No. 17/400,003, filed on Aug. 11, 2021, granted, now 11,830,748.
Application 17/400,003 is a division of application No. 16/728,472, filed on Dec. 27, 2019, granted, now 11,282,729, issued on Mar. 22, 2022.
Claims priority of provisional application 62/785,665, filed on Dec. 27, 2018.
Claims priority of application No. 201910308554.0 (CN), filed on Apr. 17, 2019; application No. 201910308956.0 (CN), filed on Apr. 17, 2019; application No. 201910308975.3 (CN), filed on Apr. 17, 2019; application No. 201920521155.8 (CN), filed on Apr. 17, 2019; application No. 201920521158.1 (CN), filed on Apr. 17, 2019; and application No. 201920521676.3 (CN), filed on Apr. 17, 2019.
Prior Publication US 2023/0352329 A1, Nov. 2, 2023
Int. Cl. H01L 21/677 (2006.01); H01L 29/08 (2006.01); C08L 27/16 (2006.01)
CPC H01L 21/67703 (2013.01) [H01L 29/08 (2013.01); C08L 27/16 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A workpiece carrier for carrying a workpiece, comprising:
a platform having a first surface and a second surface opposite to each other, the first surface defining a recess configured to carry the workpiece, the second surface defining a plurality of grounding ports; and
an electrode formed on the platform, including a plurality of first electrode portions exposed in a peripheral area of the first surface of the platform around the recess, and at least one second electrode portion disposed on a bottom of at least one of the grounding ports, wherein the plurality of first electrode portions and the at least one second electrode portion are electrically connected to each other.