CPC H01L 21/67265 (2013.01) [G01M 3/38 (2013.01); H01L 21/67259 (2013.01); H01L 21/67288 (2013.01); H01L 21/67772 (2013.01)] | 20 Claims |
1. An apparatus for inspecting wafer carriers, comprising:
a housing;
a load port configured to load a wafer carrier into the housing;
a robot arm inside the housing, wherein the robot arm is configured to move a first camera connected to the robot arm, wherein the first camera is configured to capture a plurality of images of the wafer carrier; and
a processor configured to process the plurality of images to inspect the wafer carrier.
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