CPC H01J 61/44 (2013.01) [H01J 61/06 (2013.01); H01J 61/125 (2013.01); H01J 61/16 (2013.01); H01J 61/34 (2013.01); A61L 2/10 (2013.01); A61L 2202/11 (2013.01); H01J 2893/002 (2013.01)] | 15 Claims |
1. A Far-UVC excimer light source, comprising:
a) a first electrode adapted to be energized;
b) a second electrode adapted to be energized;
c) a body defining a cavity that is filled with an excited molecule complex between the first and second electrodes; and
d) a Far-UVC filter attached to an interior side of the first electrode and adapted to filter a Far-UVC light excited in the cavity of the body, wherein the Far-UVC filter is located inside the light source, between the cavity with the excited molecules and the first electrode.
|