CPC H01J 37/32155 (2013.01) [H01J 37/32183 (2013.01)] | 32 Claims |
1. A tuning method comprising:
accessing, for a first set of one or more cycles of operation of a first radio frequency generator, a plurality of reflection parameter values associated with a second radio frequency generator;
calculating a plurality of load impedance parameter values from the plurality of reflection parameter values by applying the plurality of reflection parameter values to a computer-based model of at least a portion of a radio frequency path, wherein the radio frequency path is between the second radio frequency generator and an electrode of a plasma chamber;
receiving a plurality of frequency modulation parameters of a radio frequency signal to be generated by the second radio frequency generator;
determining values of the plurality of frequency modulation parameters by applying the plurality of load impedance parameter values to the computer-based model, wherein the values of the plurality of frequency modulation parameters are determined to minimize a reflection coefficient parameter at an input of the computer-based model; and
controlling the second radio frequency generator according to the values of the plurality of frequency modulation parameters during a second set of one or more cycles of operation of the first radio frequency generator.
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