CPC G01J 3/10 (2013.01) [G01J 3/0218 (2013.01); G01J 3/443 (2013.01); G01J 2003/2879 (2013.01)] | 20 Claims |
1. A method for calibrating an optical emission spectrometer (OES), comprising:
measuring an optical intensity of radiation from a light source mounted within a process chamber with an OES located outside the process chamber at a first time;
measuring an optical intensity of radiation from the light source mounted within the process chamber with the OES located outside the process chamber at a second time;
determining a correction factor by comparing the optical intensity of radiation at the first time with the optical intensity of radiation at the second time; and
modifying the OES by the correction factor if the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time.
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