US 11,927,482 B2
Methods for calibrating an optical emission spectrometer
Kin Pong Lo, Fremont, CA (US); Lara Hawrylchak, Gilroy, CA (US); Malcolm J. Bevan, Santa Clara, CA (US); Theresa Kramer Guarini, San Jose, CA (US); Wei Liu, Beijing (CN); and Bernard L. Hwang, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 17/604,814
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Mar. 27, 2020, PCT No. PCT/US2020/025276
§ 371(c)(1), (2) Date Oct. 19, 2021,
PCT Pub. No. WO2020/219208, PCT Pub. Date Oct. 29, 2020.
Claims priority of provisional application 62/839,416, filed on Apr. 26, 2019.
Prior Publication US 2022/0178747 A1, Jun. 9, 2022
Int. Cl. G01J 3/28 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01); G01J 3/443 (2006.01)
CPC G01J 3/10 (2013.01) [G01J 3/0218 (2013.01); G01J 3/443 (2013.01); G01J 2003/2879 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for calibrating an optical emission spectrometer (OES), comprising:
measuring an optical intensity of radiation from a light source mounted within a process chamber with an OES located outside the process chamber at a first time;
measuring an optical intensity of radiation from the light source mounted within the process chamber with the OES located outside the process chamber at a second time;
determining a correction factor by comparing the optical intensity of radiation at the first time with the optical intensity of radiation at the second time; and
modifying the OES by the correction factor if the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time.