CPC C30B 23/005 (2013.01) [C30B 23/066 (2013.01); C30B 29/16 (2013.01); C30B 29/36 (2013.01); C30B 29/38 (2013.01); C30B 35/005 (2013.01)] | 18 Claims |
1. A method for crystal growth, comprising:
placing a seed crystal and a target source material in a growth chamber of an apparatus for crystal growth;
executing a growth of a crystal based on the seed crystal and the target source material according to physical vapor transport;
determining whether a preset condition is satisfied during the growth of the crystal; and
in response to determining that the preset condition is satisfied, replacing a sublimated target source material with a candidate source material, wherein the replacing the sublimated target source material with the candidate source material includes:
placing the candidate source material in a first region of the apparatus for crystal growth; and
controlling, the candidate source material to push the sublimated target source material such that:
the candidate source material leaves the first region and enters the growth chamber; and
the sublimated target source material leaves the growth chamber and enters a second region of the apparatus for crystal growth.
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