CPC C23C 16/45553 (2013.01) [C01G 33/00 (2013.01); C23C 16/405 (2013.01)] | 17 Claims |
1. A niobium precursor compound represented by Chemical Formula 2 below:
in Chemical Formula 2,
R6 and R7 are each independently selected from a linear alkyl group having 1 to 6 carbon atoms and a branched alkyl group having 3 to 6 carbon atoms, R8 and R9 are each independently selected from hydrogen, a linear alkyl group having 1 to 10 carbon atoms, and a branched alkyl group having 3 to 10 carbon atoms, R10 is selected from a linear alkylene group having 1 to 20 carbon atoms and a branched alkylene group having 3 to 20 carbon atoms, and R11 and R12 are each independently selected from hydrogen and a linear alkyl group having 1 to 4 carbon atoms, and
in Chemical Formula 2, n is an integer of 1 to 5.
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