US 11,926,807 B2
Cleaning composition and cleaning method using the same
Jun Her, Yongin-si (KR); Na Rae Yim, Yongin-si (KR); Hyun Jin Jung, Yongin-si (KR); Myung Ho Lee, Hwaseong-si (KR); and Myung Geun Song, Yongin-si (KR)
Assigned to ENF TECHNOLOGY CO., LTD., Yongin-si (KR)
Filed by ENF TECHNOLOGY CO., LTD., Yongin-si (KR)
Filed on Sep. 14, 2021, as Appl. No. 17/447,640.
Claims priority of application No. 10-2020-0143375 (KR), filed on Oct. 30, 2020.
Prior Publication US 2022/0135915 A1, May 5, 2022
Int. Cl. C11D 3/28 (2006.01); C11D 3/00 (2006.01); C11D 3/04 (2006.01); C11D 3/30 (2006.01); C11D 3/33 (2006.01); C11D 3/43 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01)
CPC C11D 11/0047 (2013.01) [C11D 3/0073 (2013.01); C11D 3/04 (2013.01); C11D 3/046 (2013.01); C11D 3/28 (2013.01); C11D 3/30 (2013.01); C11D 3/43 (2013.01)] 15 Claims
 
1. A cleaning composition comprising: water; a fluorine compound; an alkanolamine compound; and a corrosion inhibitor,
wherein the corrosion inhibitor is a mixture of a first corrosion inhibitor represented by the following Formula 1 and a second corrosion inhibitor represented by the following Formula 2, wherein the corrosion inhibitor is a mixture mixed with 0.1 to 10 parts by weight of the second corrosion inhibitor, based on 1 part by weight of the first corrosion inhibitor:

OG Complex Work Unit Chemistry
wherein:
R1 and R3 are each independently halogen, amino, hydroxy, cyano, nitro, a carboxyl group, C1-20 alkoxy, C1-20 alkyl, or C1-20 aminoalkyl;
R2 and R4 are each independently hydrogen or C1-20 alkyl; and
n and m are each independently an integer selected from 0 to 4.