CPC B81C 1/00174 (2013.01) [G02B 26/0833 (2013.01); G02B 26/10 (2013.01); B81C 2201/0142 (2013.01); B81C 2201/0181 (2013.01); B81C 2203/032 (2013.01); G01S 7/4817 (2013.01)] | 20 Claims |
1. A method for making an omni-view peripheral scanning system, the method comprising:
fabricating a reflector using a first micro-fabrication process, wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion;
constructing a scanning micro-electro-mechanical systems (MEMS) mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform; and
bonding the reflector on top of the scanning MEMS mirror such that the scanning MEMS mirror faces the cone-shaped bottom portion to form the omni-view peripheral scanning system.
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19. A method for making an optical sensing system with an omni-view peripheral scanning system, comprising:
constructing the omni-view peripheral scanning system comprising a reflector bonded on top of a scanning MEMS mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform, and wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion; and
coupling the MEMS actuation platform to a controller for controlling a voltage differential to be applied to each of a plurality of comb drive actuators in the MEMS actuation platform.
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