US 11,926,523 B2
Microfabrication of omni-view peripheral scanning system
Youmin Wang, Berkeley, CA (US); and Yue Lu, Mountain View, CA (US)
Assigned to BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed by BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed on Sep. 9, 2021, as Appl. No. 17/470,236.
Prior Publication US 2023/0072948 A1, Mar. 9, 2023
Int. Cl. B81C 1/00 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01); G01S 7/481 (2006.01)
CPC B81C 1/00174 (2013.01) [G02B 26/0833 (2013.01); G02B 26/10 (2013.01); B81C 2201/0142 (2013.01); B81C 2201/0181 (2013.01); B81C 2203/032 (2013.01); G01S 7/4817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for making an omni-view peripheral scanning system, the method comprising:
fabricating a reflector using a first micro-fabrication process, wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion;
constructing a scanning micro-electro-mechanical systems (MEMS) mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform; and
bonding the reflector on top of the scanning MEMS mirror such that the scanning MEMS mirror faces the cone-shaped bottom portion to form the omni-view peripheral scanning system.
 
19. A method for making an optical sensing system with an omni-view peripheral scanning system, comprising:
constructing the omni-view peripheral scanning system comprising a reflector bonded on top of a scanning MEMS mirror, wherein the scanning MEMS mirror comprises a MEMS actuation platform and a scanning mirror supported by the MEMS actuation platform, and wherein the reflector comprises a cone-shaped bottom portion, and a via hole across the cone-shaped bottom portion; and
coupling the MEMS actuation platform to a controller for controlling a voltage differential to be applied to each of a plurality of comb drive actuators in the MEMS actuation platform.