CPC B24B 53/017 (2013.01) [B08B 1/002 (2013.01); B08B 3/00 (2013.01); B08B 3/14 (2013.01); B24B 37/013 (2013.01); C02F 1/00 (2013.01); H01L 21/02052 (2013.01); H01L 21/02074 (2013.01); H01L 21/67028 (2013.01); H01L 21/67253 (2013.01)] | 20 Claims |
1. A cleaning process monitoring system, comprising:
a cleaning container comprising an inlet for receiving a cleaning solution and an outlet for draining a waste solution, wherein the cleaning solution comprises a directional and focused stream of gaseous carbon dioxide (CO2);
a particle detector coupled to the outlet and configured to measure a plurality of particle parameters associated with the waste solution so as to provide a real-time monitoring of the cleaning process, wherein the particle detector comprises a plurality of channels having different sizes from one another, wherein each of the plurality of channels is configured for detecting particles of respective different sizes;
a pump coupled to the cleaning container through the outlet and configured to provide suction to draw the waste solution through the cleaning system; and
a controller coupled to the pump and the particle detector and configured to receive the plurality of particle parameters from the particle detector and to control the cleaning system.
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