CPC B08B 7/0014 (2013.01) [B08B 3/10 (2013.01)] | 20 Claims |
1. A substrate treating method comprising:
supplying a dissolution solution onto a rotating substrate; and
supplying, after the supplying a dissolution solution, a treating liquid including a polymer onto the rotating substrate to form a liquid film,
wherein the dissolution solution is provided at a boiling temperature of the dissolution solution.
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