| CPC H01L 28/10 (2013.01) [H01F 27/2804 (2013.01); H01L 23/5227 (2013.01); H01L 24/05 (2013.01); H01L 24/13 (2013.01); H01L 27/0255 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05025 (2013.01); H01L 2224/13026 (2013.01); H01L 2924/1206 (2013.01)] | 11 Claims |

|
1. An integrated circuit, comprising:
a chip substrate having a upper isolation layer with a pad thereon; and
a coil located below the metal pad, wherein, in a dimension perpendicular to a surface of the chip substrate, a perimeter of the coil overlaps with a perimeter of the pad, wherein the coil is electrically connected to the pad by one or more conductive interconnects.
|