US 12,249,618 B2
Shaped metal edge for galvanic or capacitive isolator
Matthew Thomas Canty, Nenagh (IE); Sombel Diaham, Villeneuve les Bouloc (FR); Jan Kubik, Limerick (IE); Paul Martin Lambkin, Carrigaline (IE); Baoxing Chen, Westford, MA (US); Yi Yuan, Malden, MA (US); and John G. Shanahan, Limerick (IE)
Assigned to Analog Devices International Unlimited Company, Limerick (IE)
Filed by Analog Devices International Unlimited Company, Limerick (IE)
Filed on Feb. 28, 2022, as Appl. No. 17/683,154.
Prior Publication US 2023/0275118 A1, Aug. 31, 2023
Int. Cl. H01F 27/28 (2006.01); H01F 27/34 (2006.01); H01F 41/04 (2006.01); H01L 49/02 (2006.01)
CPC H01L 28/10 (2013.01) [H01F 27/2804 (2013.01); H01F 27/34 (2013.01); H01F 41/043 (2013.01); H01F 2027/2809 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An integrated circuit device comprising:
a substrate having a main surface;
a core layer disposed over the substrate; and
a lithographically patterned primary coil, the primary coil comprising one or more windings wound around a winding axis parallel to the main surface, wherein each of the windings comprises:
a top conductive line arranged over the core layer, the top conductive line having a first thickness along a vertical axis perpendicular to the main surface, wherein a cross-section of the top conductive line in a plane parallel to the winding axis and perpendicular to the main surface comprises a rounded convex portion of a side surface of the top conductive line, the rounded convex portion having a radius of curvature larger than 1 micron,
a bottom conductive line arranged under the core layer, the bottom conductive line having a second thickness along the vertical axis, wherein a cross-section of the bottom conductive line in the plane comprises a rounded convex portion of a side surface of the bottom conductive line, the rounded convex portion having a radius of curvature larger than 1 micron,
a first conductive via extended along the vertical axis electrically connecting the top and bottom conductive lines, and
a second conductive via extended along the vertical axis electrically connecting one but not the other of the top and bottom conductive lines to a conductive line of another winding of the primary coil.