US 12,249,614 B2
Depth pixel having multiple photodiodes and time-of-flight sensor including the same
Younggu Jin, Osan-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jul. 14, 2021, as Appl. No. 17/375,148.
Claims priority of application No. 10-2020-0161448 (KR), filed on Nov. 26, 2020.
Prior Publication US 2022/0165775 A1, May 26, 2022
Int. Cl. H01L 27/146 (2006.01); H01L 27/148 (2006.01); H04N 25/705 (2023.01)
CPC H01L 27/14627 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14614 (2013.01); H01L 27/1462 (2013.01); H01L 27/14636 (2013.01); H01L 27/14643 (2013.01); H01L 27/14831 (2013.01); H04N 25/705 (2023.01)] 19 Claims
OG exemplary drawing
 
1. A depth pixel of a time-of-flight (ToF) sensor formed in a semiconductor substrate, the depth pixel comprising:
a first photodiode;
a first tap disposed at a first side of the first photodiode in a first horizontal direction and configured to sample a photo charge stored in the first photodiode;
a second tap disposed at a second side of the first photodiode in the first horizontal direction and configured to sample the photo charge stored in the first photodiode;
a second photodiode disposed at a side of the first photodiode in a second horizontal direction perpendicular to the first horizontal direction;
a third tap disposed at a first side of the second photodiode in the first horizontal direction and configured to sample a photo charge stored in the second photodiode;
a fourth tap disposed at a second side of the second photodiode in the first horizontal direction and configured to sample the photo charge stored in the second photodiode; and
a common microlens disposed above or below the semiconductor substrate, the common microlens covering both of the first photodiode and the second photodiode to focus an incident light to the first photodiode and the second photodiode,
wherein the first photodiode, the first tap, and the second tap correspond to first sub depth pixel having a two-tap structure,
wherein the second photodiode, the third tap, and the fourth tap correspond to a second sub depth pixel having the two-tap structure,
wherein the first sub depth pixel and the second sub depth pixel are symmetric with respect to a first horizontal line passing through a center of the depth pixel and extending in the first horizontal direction, and
wherein each of the first sub depth pixel and the second sub depth pixel is symmetric with respect to a second horizontal line passing through the center of the depth pixel and perpendicular to the first horizontal line.