US 12,249,605 B2
Ternary inverter and method of manufacturing the same
Kyung Rok Kim, Ulsan (KR); Jae Won Jeong, Ulsan (KR); Youngeun Choi, Ulsan (KR); and Wooseok Kim, Ulsan (KR)
Assigned to UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY), (KR)
Filed by UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY), Ulsan (KR)
Filed on Feb. 16, 2022, as Appl. No. 17/673,754.
Claims priority of application No. 10-2021-0085671 (KR), filed on Jun. 30, 2021.
Prior Publication US 2023/0005909 A1, Jan. 5, 2023
Int. Cl. H01L 27/092 (2006.01); H01L 21/02 (2006.01); H01L 21/8238 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01)
CPC H01L 27/0922 (2013.01) [H01L 21/0259 (2013.01); H01L 21/823807 (2013.01); H01L 21/823814 (2013.01); H01L 29/0665 (2013.01); H01L 29/42392 (2013.01); H01L 29/66545 (2013.01); H01L 29/66742 (2013.01); H01L 29/78618 (2013.01); H01L 29/78696 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A ternary inverter comprising:
a first source and a first drain apart from each other;
an interlayer insulating film on the first source;
a second source on the interlayer insulating film and a second drain on the first drain;
a first channel positioned between the first source and the first drain and having a 1st-1st end surface in a direction to the first source and a 1st-2nd end surface in a direction to the first drain, wherein the 1st-1st end surface is in contact with the first source, and the 1st-2nd end surface is in contact with the first drain;
a second channel disposed over the first channel to be apart from the first channel, positioned between the second source and the second drain, and having a 2nd-1st end surface in a direction to the second source and a 2nd-2nd end surface in a direction to the second drain, wherein the 2nd-1st end surface is in contact with the second source, and the 2nd-2nd end surface is in contact with the second drain;
a gate insulating film covering an outer surface of the first channel, an outer surface of the second channel, a part of a surface of the first source in the direction to the first drain, the part other than a portion thereof in contact with the first channel, a part of a surface of the second source in the direction to the second drain, the part other than a portion thereof in contact with the second channel, a part of a surface of the first drain in the direction to the first source, the part other than a portion thereof in contact with the first channel, and a part of a surface of the second drain in the direction to the second source, the part other than a portion thereof in contact with the second channel;
a gate electrode between the first source and the first drain and between the second source and the second drain; and
a constant current forming layer, wherein the first source and the first drain are disposed on the constant current forming layer.