| CPC H01L 23/49861 (2013.01) [H01L 21/32139 (2013.01); H01L 23/3121 (2013.01); H01L 23/482 (2013.01); H01L 23/49838 (2013.01); H01L 23/49894 (2013.01)] | 16 Claims |

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1. A pre-mold substrate, comprising:
an electroconductive base member, which comprises a first pre-mold groove formed in a bottom surface and a second pre-mold groove formed in a top surface and constitutes a circuit pattern;
a first pre-mold resin disposed in the first pre-mold groove; and
a second pre-mold resin disposed in the second pre-mold groove, wherein:
a bottom surface of a first portion of the electroconductive base member is coplanar with a surface of the first pre-mold resin;
the first portion of the electroconductive base member has a respective height;
a top surface of a second portion of the electroconductive base member is coplanar with a surface of the second pre-mold resin; and
the second portion of the electroconductive base member has a respective height which is less than the respective height of the first portion of the electroconductive base member, wherein the first portion of the electroconductive base member comprises a step down from a height of the surface of the second pre-mold resin to a height of an interface between the first and second pre-mold resins.
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