US 12,249,537 B2
Substrate flipping in vacuum for dual sided PVD sputtering
Harish V Penmethsa, Dublin, CA (US); Suresh Palanisamy, Coimbatore (IN); Dinesh Rajamanickam, Coimbatore (IN); and Naresh Kumar Asokan, Coimbatore (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 28, 2023, as Appl. No. 18/521,446.
Application 18/521,446 is a continuation of application No. 17/493,283, filed on Oct. 4, 2021, granted, now 11,881,427.
Prior Publication US 2024/0096687 A1, Mar. 21, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/687 (2006.01); B65G 47/248 (2006.01); C23C 14/34 (2006.01); C23C 14/56 (2006.01)
CPC H01L 21/68764 (2013.01) [B65G 47/248 (2013.01); C23C 14/34 (2013.01); C23C 14/566 (2013.01); H01L 21/68728 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A module of a processing system for flipping a substrate in vacuum, the module comprising:
a clamp assembly for securing a substrate placed in a first plane;
a first motor assembly coupled to the clamp assembly for rotating the clamp assembly around a first direction that is parallel to the first plane;
a first plate;
a second plate parallel to the first plate, the second plate movably coupled to the first plate in a second direction that is perpendicular to the first plane by a pair of spring-loaded connectors, the pair of spring-loaded connectors biasing the first and second plates towards each other to a clamped position, wherein each of the pair of spring-loaded connectors includes a pin disposed through the first and second plates and a pair of springs disposed at opposite ends of the pin; and
a slide coupled to the clamp assembly on a side opposite the first motor assembly in the first direction, wherein the slide comprises a bearing support that supports:
rotation of the clamp assembly by the first motor assembly around the first direction through a rotatable bearing.