US 12,249,536 B2
Substrate supporting assembly and substrate processing apparatus
Hyun Jong Lee, Hwaseong-si (KR); Chong Hwan Jong, Anseong-si (KR); Ho Jin Nam, Suwon-si (KR); Choong hyun Lee, Hwaseong-si (KR); and Eo jin Kwon, Osan-si (KR)
Assigned to WONIK IPS CO., LTD., Pyeongtaek-si (KR)
Filed by WONIK IPS CO., LTD., Pyeongtaek-si (KR)
Filed on Nov. 5, 2021, as Appl. No. 17/520,353.
Claims priority of application No. 10-2020-0154839 (KR), filed on Nov. 18, 2020.
Prior Publication US 2022/0157644 A1, May 19, 2022
Int. Cl. H01L 21/687 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01)
CPC H01L 21/68764 (2013.01) [C23C 16/45544 (2013.01); C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); H01L 21/68771 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A substrate supporting assembly comprising:
a susceptor plate comprising at least one substrate seat where a substrate is seated, and a plurality of gas flow lines that supply a lifting gas, an acceleration gas, and a deceleration gas to the substrate seat; and
at least one satellite disposed on the at least one substrate seat and comprising an upper surface where the substrate is seated and a lower surface including a power transmission pattern that receives a rotational force and a braking force from the acceleration gas and the deceleration gas, respectively;
wherein the at least one satellite is lifted from the at least one substrate seat by the lifting gas supplied from the at least one substrate seat, is rotated relative to the susceptor plate when the acceleration gas supplied in a forward direction of rotation collides with one side of the power transmission pattern and is decelerated or stopped when the deceleration gas supplied in a reverse direction of rotation collides with the other side of the power transmission pattern; and
wherein the power transmission pattern comprises a plurality of symmetric grooves disposed at an edge of the lower surface of the at least one satellite, wherein each of the plurality of symmetric grooves has a first side and a second side opposite to the first side such that the first side receives the rotational force from the acceleration gas and the second side receives the braking force from the deceleration gas.