US 12,249,534 B2
Detection method for seized traveling lift pins in wafer processing reactor systems
Eric Shero, Phoenix, AZ (US); Abhishek Mangoli, Phoenix, AZ (US); Harihara Krishnan Krishnamoorthy, Tempe, AZ (US); Daniel Maurice, Phoenix, AZ (US); Julio Cesar Diaz, Gilbert, AZ (US); and Massood Mostaghimi, Scottsdale, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Aug. 15, 2022, as Appl. No. 17/887,646.
Claims priority of provisional application 63/234,326, filed on Aug. 18, 2021.
Prior Publication US 2023/0054779 A1, Feb. 23, 2023
Int. Cl. H01L 21/687 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68742 (2013.01) [H01L 21/67259 (2013.01); H01L 22/10 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A reactor system with stuck lift pin detection, comprising:
a reaction chamber;
a susceptor for supporting wafers in an interior space of the reaction chamber;
an elevator coupled to the susceptor and configured to raise and lower the susceptor in the interior space;
a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator;
a landing pad for receiving a base of the lift pin when the lift pin is in the down position; and
a sensor assembly with a sensor positioned at least partially within the interior space of the reaction chamber, wherein an output signal of the sensor is indicative of whether the lift pin is sticking or seizing during travel through the susceptor.