US 12,249,521 B2
Temperature control unit
Shuhei Hatano, Shizuoka (JP); and Hideki Moriuchi, Shizuoka (JP)
Assigned to Tomoegawa Corporation, Tokyo (JP)
Appl. No. 18/007,387
Filed by Tomoegawa Corporation, Tokyo (JP)
PCT Filed Sep. 13, 2021, PCT No. PCT/JP2021/033520
§ 371(c)(1), (2) Date Jan. 30, 2023,
PCT Pub. No. WO2022/123846, PCT Pub. Date Jun. 16, 2022.
Claims priority of application No. 2020-205832 (JP), filed on Dec. 11, 2020.
Prior Publication US 2023/0282495 A1, Sep. 7, 2023
Int. Cl. F28F 7/00 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67103 (2013.01) 20 Claims
OG exemplary drawing
 
16. A temperature control unit comprising:
a substantially flat-plate-shaped placement section configured to support a heat transfer target;
a heating section configured to heat a heat transfer target placed on the placement section;
a heat transfer section disposed in contact with at least one of the placement section and the heating section; and
a housing configured to house the heat transfer section between the placement section and the housing, wherein
the housing is formed to have a space configured to allow fluid to flow therein,
the space formed in the housing is demarcated into a plurality of regions by a partition member, and
each of the regions is configured to allow fluid to flow therein.