US 12,249,501 B2
Susceptor manufacturing method and the manufactured susceptor using the same
Hoyoun Jang, Hwaseong-si (KR); and Gopu Krishna, Hwaseong-si (KR)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 24, 2024, as Appl. No. 18/674,025.
Claims priority of provisional application 63/469,575, filed on May 30, 2023.
Prior Publication US 2024/0404779 A1, Dec. 5, 2024
Int. Cl. H01J 9/36 (2006.01); H01J 9/24 (2006.01); H01J 9/30 (2006.01); H01J 9/34 (2006.01); H01J 37/32 (2006.01)
CPC H01J 9/36 (2013.01) [H01J 9/245 (2013.01); H01J 9/30 (2013.01); H01J 37/32724 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of providing a stable connector that connects a heating element to a rod in a deposition apparatus, the method comprising:
forming a dome-shaped electrode connector inside of a ceramic material;
drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector; and
bonding a rod into a remaining part of the electrode connector.