US 12,249,490 B2
Single crystal metal oxide plasma chamber component
Lin Xu, Fremont, CA (US); Douglas Detert, Fremont, CA (US); John Daugherty, Fremont, CA (US); Pankaj Hazarika, Fremont, CA (US); Satish Srinivasan, Fremont, CA (US); Nash W. Anderson, Fremont, CA (US); John Michael Kerns, Fremont, CA (US); Robin Koshy, Fremont, CA (US); David Joseph Wetzel, Fremont, CA (US); Lei Liu, Fremont, CA (US); and Eric A. Pape, Fremont, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/770,147
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Oct. 21, 2020, PCT No. PCT/US2020/056707
§ 371(c)(1), (2) Date Apr. 19, 2022,
PCT Pub. No. WO2021/091695, PCT Pub. Date May 14, 2021.
Claims priority of provisional application 62/939,422, filed on Nov. 22, 2019.
Claims priority of provisional application 62/930,872, filed on Nov. 5, 2019.
Prior Publication US 2022/0392753 A1, Dec. 8, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32467 (2013.01) [H01J 37/3244 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A component of a plasma processing chamber, wherein at least one plasma facing surface of the component comprises single crystal metal oxide material, wherein the single crystal metal oxide material is single crystal spinel.