US 12,249,482 B2
Microscopy feedback for improved milling accuracy
Thomas Gary Miller, Portland, OR (US); Jason Arjavac, Hillsboro, OR (US); Brian Routh, Jr., Beaverton, OR (US); and Mark Biedrzycki, Beaverton, OR (US)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jul. 26, 2022, as Appl. No. 17/873,532.
Claims priority of provisional application 63/290,438, filed on Dec. 16, 2021.
Prior Publication US 2023/0197403 A1, Jun. 22, 2023
Int. Cl. H01J 37/30 (2006.01); H01J 37/147 (2006.01); H01J 37/28 (2006.01); H01J 37/305 (2006.01)
CPC H01J 37/3005 (2013.01) [H01J 37/1478 (2013.01); H01J 37/28 (2013.01); H01J 37/3053 (2013.01); H01J 2237/30405 (2013.01)] 26 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a milling tool configured to mill a sample using a first particle beam;
an imaging tool configured to generate one or more images of the sample using a second particle beam; and
a controller configured to:
cause the milling tool to mill the sample to a first edge, using a first value of a control parameter;
determine a second value of the control parameter changed from the first value by an amount based on a distance between the first edge and a target position, wherein the distance is determined from an image, acquired by the imaging tool, of a surface of the sample, and wherein the image indicates, on the surface, the first edge and the target position; and
cause the milling tool to mill the sample to a second edge, using the second value of the control parameter.