US 12,249,478 B2
Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system
Hans Fritz, Grabs (CH); András G. Major, Oberkochen (DE); Dirk Zeidler, Oberkochen (DE); Arne Thoma, Heidenheim (DE); and Joerg Jacobi, Herbrechtingen (DE)
Assigned to Carl Zeiss MultiSEM GmbH, Oberkochen (DE)
Filed by Carl Zeiss MultiSEM GmbH, Oberkochen (DE)
Filed on Dec. 9, 2021, as Appl. No. 17/546,952.
Application 17/546,952 is a continuation of application No. PCT/DE2020/000100, filed on May 20, 2020.
Claims priority of application No. 102019004124.0 (DE), filed on Jun. 13, 2019.
Prior Publication US 2022/0102104 A1, Mar. 31, 2022
Int. Cl. H01J 37/147 (2006.01); H01J 37/09 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/1475 (2013.01) [H01J 37/09 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/152 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A particle beam system, comprising:
a multi-beam particle source configured to generate a multiplicity of charged individual particle beams; and
a magnetic multi-deflector array:
a magnetically conductive multi-aperture plate comprising a multiplicity of openings, the multi-aperture plate being in a beam path of the individual particle beams so that different individual particle beams substantially pass through different openings in the multi-aperture plate;
a magnetically conductive first aperture plate comprising an individual opening, the first aperture plate being in the beam path of the individual particle beams so that a multiplicity of the individual particle beams substantially pass through the individual opening in the first aperture plate; and
a first coil configured to generate a magnetic field,
wherein:
the multi-aperture plate and the first aperture plate are connected to each other to define a first cavity therebetween;
the first cavity comprises an interior and inner sidewalls that define an outer boundary of the interior of the first cavity in a direction perpendicular to an optical axis of the particle beam system; and
the first coil is disposed on the inner sidewalls of the first cavity so that the first coil is rotationally symmetric around an optical axis of the particle beam system;
during use of the particle beam system, the multiplicity of individual particle beams substantially passes through the first coil so that the individual particle beams are deflected in an azimuthal direction to correct an azimuthal telecentricity error of the particle beam system so that the individual particle beams telecentrically impinge on an object plane of the particle beam system.