US 12,249,477 B2
Large scale stable field emitter for high current applications
Robert C. Sheehy, Tonsley (AU); Brian Gonzales, Tonsley (AU); Peter Yaron, Tonsley (AU); Anthony Skeats, Tonsley (AU); Steven Trewartha, Tonsley (AU); Susanne Sahlos, Tonsley (AU); and Gandalf Du Preez, Tonsley (AU)
Assigned to MICRO-X Limited, Tonsley (AU)
Filed by MICRO-X LIMITED, Tonsley (AU)
Filed on Apr. 1, 2024, as Appl. No. 18/623,938.
Application 18/623,938 is a continuation of application No. 17/045,463, granted, now 11,955,306, previously published as PCT/AU2019/000042, filed on Apr. 4, 2019.
Claims priority of application No. 2018901153 (AU), filed on Apr. 6, 2018.
Prior Publication US 2024/0266136 A1, Aug. 8, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 35/06 (2006.01); B82Y 15/00 (2011.01); B82Y 40/00 (2011.01); C01B 32/158 (2017.01); H01J 9/02 (2006.01)
CPC H01J 35/065 (2013.01) [C01B 32/158 (2017.08); H01J 9/025 (2013.01); B82Y 15/00 (2013.01); B82Y 40/00 (2013.01); H01J 2201/30469 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing a field emission electron source device comprising:
forming a current sharing matrix layer electrically connected to a substrate, wherein the current sharing matrix is either bonded to the substrate, deposited on the substrate, formed directly on the substrate, or formed directly in the substrate; and
forming an emitter surface comprised of a plurality of nanoscale field emitters electrically connected to the matrix sharing layer, wherein the emitter surface is formed by either obtaining a plurality of nanoscale field emitters and bonding to the current sharing matrix layer or forming the plurality of nanoscale field emitters directly on the current sharing matrix layer,
wherein
the current sharing matrix incorporates a plurality of series resistive pathways between the plurality of individual nanoscale field emitters and the substrate to force current sharing among the plurality of individual nanoscale field emitters,
such that in use, the field emission electron source device emits electrons with a spatially even distribution across an emitter region of the emitter surface having an area of at least one square millimeter and at a current density greater or equal to one milliampere per square millimeter.