US 12,249,059 B2
Navigation accuracy using camera coupled with detector assembly
Alexander Krokhmal, Haifa (IL); Alexander Brandt, Tiberias (IL); Dor Perry, Haifa (IL); Asher Peled, Kfar-Vradim (IL); and Matthew Wormington, Highlands Ranch, CO (US)
Assigned to Bruker Technologies Ltd., Migdal HaEmek (IL)
Filed by BRUKER TECHNOLOGIES LTD., Migdal HaEmek (IL)
Filed on Mar. 31, 2022, as Appl. No. 17/709,451.
Prior Publication US 2023/0316487 A1, Oct. 5, 2023
Int. Cl. G06T 7/00 (2017.01)
CPC G06T 7/0004 (2013.01) [G06T 2207/10116 (2013.01); G06T 2207/30148 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A system, comprising:
a first imaging assembly, which comprises an optical microscope, is configured to produce a first image of a measurement site, which comprises a structure produced in a sample comprising a semiconductor substrate;
a second imaging assembly, which comprises an optical camera, is coupled with a measurement assembly and is configured to produce a second image of the measurement site; and
a processor, which is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.