US 12,248,247 B2
Wire grid polarizer and fabrication method therefor
Xiao Zhang, Beijing (CN); Yongxing Liu, Beijing (CN); Jiahui Han, Beijing (CN); Hua Huang, Beijing (CN); Kang Guo, Beijing (CN); and Xin Gu, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/764,418
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed May 19, 2021, PCT No. PCT/CN2021/094526
§ 371(c)(1), (2) Date Mar. 28, 2022,
PCT Pub. No. WO2022/001447, PCT Pub. Date Jan. 6, 2022.
Claims priority of application No. 202010620071.7 (CN), filed on Jun. 30, 2020.
Prior Publication US 2022/0373884 A1, Nov. 24, 2022
Int. Cl. G02B 5/30 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/0007 (2013.01) [G02B 5/3058 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A wire grid polarizer, wherein the wire grid polarizer comprises:
a substrate;
a first wire grid, formed on the substrate, the first wire grid comprising a plurality of first wire grid reflection strips arranged parallel to each other and at equal intervals; and
a second wire grid, formed at a side of the first wire grid away from the substrate, the second wire grid comprising a plurality of second wire grid reflection strips arranged in parallel to each other and at equal intervals;
wherein the plurality of second wire grid reflection strips is in one-to-one correspondence with the plurality of first wire grid reflection strips, an orthographic projection of one of the plurality of second wire grid reflection strips onto the substrate falls within an orthographic projection of a corresponding one of the plurality of first wire grid reflection strips onto the substrate, and a wire width for the plurality of second wire grid reflection strips is less than a wire width for the plurality of the first wire grid reflection strips, and a wire spacing for the plurality of second wire grid reflection strips is greater than a wire spacing for the plurality of first wire grid reflection strips;
wherein the second wire grid is arranged in a first arrangement or a second arrangement;
wherein in the first arrangement, the second wire grid comprises:
a plurality of imprinting adhesive grid strips, arranged parallel to each other and at equal intervals, wherein the plurality of imprinting adhesive grid strips is formed by using an imprinting adhesive material, each of the plurality of imprinting adhesive grid strips comprises a top end located at a side away from the substrate, a bottom end located at a side adjacent to the substrate, and a side face located between the top end and the bottom end; and
a plurality of reflection grid strips, arranged in parallel to each other and at equal intervals, wherein the plurality of reflection grid strips is formed by using a wire grid reflection material, the plurality of reflection grid strips is in one-to-one correspondence with the plurality of imprinting adhesive grid strips, and each of the plurality of reflection grid strips covers a top end and a side face of a corresponding one of the plurality of imprinting adhesive grid strips;
wherein in the second arrangement, the second wire grid comprises:
a plurality of imprinting adhesive grid strips, arranged parallel to each other and at equal intervals, wherein the plurality of imprinting adhesive grid strips is formed by using an imprinting adhesive material, each of the plurality of imprinting adhesive grid strips comprises a top end located at a side away from the substrate, a bottom end located at a side adjacent to the substrate, and a side face located between the top end and the bottom end; and
a plurality of reflection grid strips, arranged in parallel to each other and at equal intervals, wherein the plurality of reflection grid strips is formed by using a wire grid reflection material, the plurality of reflection grid strips is in one-to-one correspondence with the plurality of imprinting adhesive grid strips, and each of the plurality of reflection grid strips is only located on a top end of a corresponding one of the plurality of imprinting adhesive grid strips.