| CPC G03F 7/0005 (2013.01) [G02B 25/001 (2013.01)] | 20 Claims |

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1. A waveguide, comprising:
a base substrate, the base substrate having a base substrate thickness distribution;
an index matching layer disposed over the base substrate, wherein the index matching layer and the base substrate have a target thickness distribution defined by a distance between a top surface of the index matching layer and a bottom surface of the base substrate, wherein the target thickness distribution is different than the base substrate thickness distribution; and
a plurality of optical device structures.
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