US 12,248,246 B2
Freeform optical substrates in waveguide displays
David Alexander Sell, Santa Clara, CA (US); and Samarth Bhargava, Saratoga, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 28, 2023, as Appl. No. 18/398,409.
Application 18/398,409 is a continuation of application No. 18/337,289, filed on Jun. 19, 2023, granted, now 12,044,964.
Application 18/337,289 is a continuation of application No. 17/315,613, filed on May 10, 2021, granted, now 11,720,016, issued on Aug. 8, 2023.
Prior Publication US 2024/0126166 A1, Apr. 18, 2024
Int. Cl. G03F 7/00 (2006.01); G02B 25/00 (2006.01)
CPC G03F 7/0005 (2013.01) [G02B 25/001 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A waveguide, comprising:
a base substrate, the base substrate having a base substrate thickness distribution;
an index matching layer disposed over the base substrate, wherein the index matching layer and the base substrate have a target thickness distribution defined by a distance between a top surface of the index matching layer and a bottom surface of the base substrate, wherein the target thickness distribution is different than the base substrate thickness distribution; and
a plurality of optical device structures.